in materials science, control of technology and especially micro- and nano-sized
objects. Considering the importance of multi-parameter diagnostics of objects with the
help of SMM, the theory of reconstructing images of the distribution of various
physical quantities, which characterize the various properties of objects, also requires
substantial development.
The numerical researches presented in the monograph clearly convince that SMM
images have complex character, depending both on the type of the measured
information extracted during scanning and on the influence of the physical parameters
of the near-surface region of the object on its magnitude. Therefore, the interpretation
of these images is complex.
One of the possible decoding approaches, based on the formation of a set of
measuring signals is approved, by creating images at two or more values of the gap
between the probe tip and the object. Approbation of the approach is carried out by the
example of a two-parameter image division into an image of the surface profile h
Z
(x,
y) and the dielectric permittivity ε (x, y).
If we supplement such a set with a combined signal of the form ΔQ
S
-1
(x, y), then
the complex SMM image will be divided into three physical components ε (x, y), σ (x,
y) and h
Z
(x, y). It is stated that in order to obtain the true values of ε, tgδ and h
Z
, it is
necessary to use analytically approximated characteristics of the transformation, the
form of which was described by us in the previous paper.
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